Laser Diode-Based Metrology Module

Project number: 
21060
Sponsor: 
ASML US, Inc.
Academic year: 
2020-2021
Project Goal: Design, build and bench test a compact laser diode-based metrology module that can illuminate a stream of water droplets and record the reflected signal from each droplet (or group of droplets) over a given time interval using a suitable solid-state detector.

The current metrology solution to precisely locate tin droplets in the primary chamber is bulky and difficult to service, which reduces the use of lithography machines.

This new laser diode-based metrology module, or LDMM, creates a stream of submillimeter water droplets and then detects the position of these droplets using a laser diode-based optical metrology system. A fast, solid-state detector analyzes the reflection of visible laser light from the surface of the droplet. Once the system detects a droplet, it sends a timing signal to an external source, such as an LED or laser, that could theoretically intercept the position of the droplet.

New software provides a graphical user interface, and a host computer allows the user to operate the LDMM's droplet generation characteristics.

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