Project number
25073
Organization
UA Department of Chemical and Environmental Engineering
Offering
ENGR498-F2024-S2025
Semiconductor manufacturing requires cleanrooms that maintain precise environmental conditions regardless of conditions outside the facility. This includes strict control over temperature, humidity and air quality. These conditions are essential for ensuring the quality and reliability of sensitive semiconductor products. HVAC systems in these facilities are primary contributors of energy consumption and thus environmental degradation. With the goal of minimizing energy consumption and environmental impact, the team set out to optimize the recirculation of air while ensuring industry standards are met.
The team designed and calculated energy consumption of the HVAC system for several different air configurations. The focus was on maximizing the use of recycled air in each system. The team used Matlab to automate hourly energy calculations over an entire year using historical weather data. They then compared each configuration and determined the most energy efficient designs that met the strict air quality needs of semiconductor cleanrooms considering outside conditions. At the end of this process, the team extrapolated climate change data to predict how the energy consumption needs and cost of HVAC systems in semiconductor fabrication facilities will change in the future.
The team designed and calculated energy consumption of the HVAC system for several different air configurations. The focus was on maximizing the use of recycled air in each system. The team used Matlab to automate hourly energy calculations over an entire year using historical weather data. They then compared each configuration and determined the most energy efficient designs that met the strict air quality needs of semiconductor cleanrooms considering outside conditions. At the end of this process, the team extrapolated climate change data to predict how the energy consumption needs and cost of HVAC systems in semiconductor fabrication facilities will change in the future.