SEMILITHO: Semiconductor Lithography Tool Prototype

Project number
25511
Organization
UA Materials Science and Engineering
Offering
ENGR498-S2025-F2025
The goal is to develop a table-top, compact, simple, portable photolithography tool prototype capable of patterning basic designs on small wafers with micron-scale precision. The prototype will be used as an educational and training resource for semiconductor device fabrication in coursework and outreach activities at the University of Arizona.

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