Project number
25511
Organization
UA Materials Science and Engineering
Offering
ENGR498-S2025-F2025
Photolithography is fundamental in the semiconductor industry, however, due to its high cost and large footprint, educational institutions lack information and tools to spread knowledge regarding semiconductors fabrication. To address this, we have developed a compact, portable photolithography prototype tool that emphasizes accessibility and affordability enabling educational outreach.
The design uses a Digital Light Processor (DLP) which includes a Digital Micromirror Device and a Digital Micromirror Device controller that allows the system to create an image on the wafer. The image passes from the DLP through a lens and beam splitter module and then lastly through the objective lens to ensure the image is in micron scale. The design includes an alignment camera that ensures the image is aligned with the wafer. Additionally, our team designed the system enclosure to be made of a UV-protective, transparent material so that viewers can safely observe the photolithography process. We designed the X, Y, and Z stage
along with the code for the motor controllers that are responsible for the automated stage movement. The system itself is controlled by the user via a laptop through a graphical user interface that our team developed. This is how the images are sent to the SEMILITHO. The SEMILITHO has successfully produced a patterned wafer that features the project name, university, team members, PI, sponsor, and date all in micron-scale.
The design uses a Digital Light Processor (DLP) which includes a Digital Micromirror Device and a Digital Micromirror Device controller that allows the system to create an image on the wafer. The image passes from the DLP through a lens and beam splitter module and then lastly through the objective lens to ensure the image is in micron scale. The design includes an alignment camera that ensures the image is aligned with the wafer. Additionally, our team designed the system enclosure to be made of a UV-protective, transparent material so that viewers can safely observe the photolithography process. We designed the X, Y, and Z stage
along with the code for the motor controllers that are responsible for the automated stage movement. The system itself is controlled by the user via a laptop through a graphical user interface that our team developed. This is how the images are sent to the SEMILITHO. The SEMILITHO has successfully produced a patterned wafer that features the project name, university, team members, PI, sponsor, and date all in micron-scale.