Project number
26063
Organization
ASML US, Inc.
Offering
ENGR498-F2025-S2026
One of ASML's metrology tool currently uses a rotatory device, Illumination Mode Selector (IMS), to switch between different apertures to define the pupil shape, with a switch time of ~ 12 ms. However, this switch time will become a bottleneck in future sensor throughput. ASML is interested in alternative cost-effective solutions that will enable fast switching (<1.5 ms) between apertures with high photon efficiency. Typical apertures have the following geometry- circular, annular, squares, quadrants.
Searching for driven students to review literature to identify alternative technologies and numerically investigate them to qualify them against provided specifications. Use learnings to design and develop a prototype.
***This project is conducting remote interviews. Please visit https://bit.ly/ASML26063 to schedule a time to speak to the sponsor***
Searching for driven students to review literature to identify alternative technologies and numerically investigate them to qualify them against provided specifications. Use learnings to design and develop a prototype.
***This project is conducting remote interviews. Please visit https://bit.ly/ASML26063 to schedule a time to speak to the sponsor***