Project number
26072
Organization
ASML US, Inc.
Offering
ENGR498-F2025-S2026
Design, build, and bench test an optical metrology module that measures the size, velocity, and particle trajectory of microspheres between the size of 100-500 um.
Problem and Capstone Statement (using microspheres):
The detection and qualification of Sn debris after the creation of plasma is critical for informing the extent of contamination in the scanner. This information can be used to tune system design to minimize debris creation and ensure a high yield of wafers. It is desirable to produce a metrology system that measures the size, velocity, and trajectory of moving targets - microspheres - for quantifying the extent of Sn debris within the EUV system to inform Sn management strategies.
The project task is to design and build a prototype system using commercial off-the-shelf parts, supplemented by 3D-printed or locally-machined parts, to deliver a unit that will be tested on a UA test bench. The approximate size of the system (metrology unit) consisting of the microsphere launch system, light source, and detector should fit inside a cube of no more than 2ft on each side – additional circuitry for collecting and displaying outputs need not be included in the contained metrology unit. Further details will be explored by the team during conversations with ASML leads.
Problem and Capstone Statement (using microspheres):
The detection and qualification of Sn debris after the creation of plasma is critical for informing the extent of contamination in the scanner. This information can be used to tune system design to minimize debris creation and ensure a high yield of wafers. It is desirable to produce a metrology system that measures the size, velocity, and trajectory of moving targets - microspheres - for quantifying the extent of Sn debris within the EUV system to inform Sn management strategies.
The project task is to design and build a prototype system using commercial off-the-shelf parts, supplemented by 3D-printed or locally-machined parts, to deliver a unit that will be tested on a UA test bench. The approximate size of the system (metrology unit) consisting of the microsphere launch system, light source, and detector should fit inside a cube of no more than 2ft on each side – additional circuitry for collecting and displaying outputs need not be included in the contained metrology unit. Further details will be explored by the team during conversations with ASML leads.