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Dark-Field Inspection Module for Objective-Surface Particle Detection

Project number
27065
Organization
ASML US, Inc.
Offering
ENGR498-F2026-S2027
Design, build, and validate a compact dark-field optical inspection module capable of detecting particles and contamination on opaque objective surfaces. The project will develop a common illumination and detection architecture using off-the-shelf optical and mechanical components while minimizing bright-field reflections through dark-field illumination techniques. Students will design the optical layout, mechanical packaging, image acquisition system, and image-processing algorithms required to detect approximately 100 µm particles with high reliability. The final system should satisfy packaging constraints, achieve processing times below one second per image, and demonstrate robust contamination detection performance using representative test samples.

***This project is conducting remote interviews. Please see remote interview sheet on BrightSpace (D2L) to schedule a time to speak to the sponsor.***

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