Project number
27070
Organization
Xcimer Energy Corporation
Offering
ENGR498-F2026-S2027
Background and Purpose
The Deep Ultra-Violet autoCollimator & Alignment Telescope System (DUVCATS) project aims to solve a critical alignment
and metrology challenge for deep ultra-violet (DUV) optical systems. While commercially available autocollimators and
alignment telescopes operate exceptionally well in the visible, near-infrared, and standard UV spectrums, they fail to
provide adequate feedback for DUV beamlines. This is due to poor signal throughput from standard substrate materials
and optical coatings, as well as focal shifts induced by powered transmissive optics. To support the precise alignment
and in-situ characterization of multi-element DUV optical systems—such as those used in Xcimer’s inertial confinement
fusion (ICF) architecture—the team will design, build, and validate a highly specialized DUV-compatible autocollimator
and alignment telescope.
Optical and Functional Capabilities
DUVCATS must function similarly to high-end commercial digital autocollimators, but optimized exclusively for the DUV
spectrum. The system requires a continuous zoom focus range from 30 cm out to infinity, allowing it to image both
nearby optical surfaces and distant targets, as well as project reticle crosshairs across this entire focal range. The
optical engine will utilize a DUV source, likely a broadband LED, heavily filtered to a 240–270 nm range, with
interchangeable narrow-band filters specifically targeting 248 nm (±5 nm) and 266 nm (±5 nm). Feedback will be
captured by a specialized DUV sensor (e.g., Basler UV camera), supplemented by a secondary coaxial LED illumination
source to clearly illuminate targets and surfaces along the optical axis.
Opto-Mechanical and Pointing Requirements
A major mechanical focus of this project is the development of a highly stable, adjustable base. The mounting system
must feature locking capabilities and provide high-resolution micro-adjustments across multiple degrees of freedom
(x/y decenter, x/y tip/tilt, and clocking). Uniquely, the system must also feature macro-pointing capabilities,
allowing the operator to index the entire optical head by ±90 degrees and 180 degrees. Once indexed into these
orthogonal or retro-reflective positions, the mount must still allow for the same high-resolution micro-adjustments to
establish precise optical axes in complex, multi-directional beamline setups.
Software Integration and Multidisciplinary Execution
The hardware must be paired with a custom software suite and graphical user interface (GUI) to display real-time
sensor readout, calculate calibrated angle offsets, and provide precise digital metrology metrics. This generalized,
non-IP project requires a highly multidisciplinary approach. The team will handle the full engineering lifecycle:
establishing baseline requirements with Xcimer, selecting commercial-off-the-shelf (COTS) DUV optics and sensors,
performing rigorous opto-mechanical design and tolerancing, developing the readout software, and ultimately
calibrating and assembling the final physical units.
Hardware Funding
Xcimer Energy will supply sufficient hardware funding in addition to the $4.5K initially allotted to the project. Xcimer Energy will either procure as-needed hardware internally have it delivered to the senior design group, or work with the student team and university to establish an efficient means to obtain hardware. Total hardware budget is expect to be on the order of $20k-30k
The Deep Ultra-Violet autoCollimator & Alignment Telescope System (DUVCATS) project aims to solve a critical alignment
and metrology challenge for deep ultra-violet (DUV) optical systems. While commercially available autocollimators and
alignment telescopes operate exceptionally well in the visible, near-infrared, and standard UV spectrums, they fail to
provide adequate feedback for DUV beamlines. This is due to poor signal throughput from standard substrate materials
and optical coatings, as well as focal shifts induced by powered transmissive optics. To support the precise alignment
and in-situ characterization of multi-element DUV optical systems—such as those used in Xcimer’s inertial confinement
fusion (ICF) architecture—the team will design, build, and validate a highly specialized DUV-compatible autocollimator
and alignment telescope.
Optical and Functional Capabilities
DUVCATS must function similarly to high-end commercial digital autocollimators, but optimized exclusively for the DUV
spectrum. The system requires a continuous zoom focus range from 30 cm out to infinity, allowing it to image both
nearby optical surfaces and distant targets, as well as project reticle crosshairs across this entire focal range. The
optical engine will utilize a DUV source, likely a broadband LED, heavily filtered to a 240–270 nm range, with
interchangeable narrow-band filters specifically targeting 248 nm (±5 nm) and 266 nm (±5 nm). Feedback will be
captured by a specialized DUV sensor (e.g., Basler UV camera), supplemented by a secondary coaxial LED illumination
source to clearly illuminate targets and surfaces along the optical axis.
Opto-Mechanical and Pointing Requirements
A major mechanical focus of this project is the development of a highly stable, adjustable base. The mounting system
must feature locking capabilities and provide high-resolution micro-adjustments across multiple degrees of freedom
(x/y decenter, x/y tip/tilt, and clocking). Uniquely, the system must also feature macro-pointing capabilities,
allowing the operator to index the entire optical head by ±90 degrees and 180 degrees. Once indexed into these
orthogonal or retro-reflective positions, the mount must still allow for the same high-resolution micro-adjustments to
establish precise optical axes in complex, multi-directional beamline setups.
Software Integration and Multidisciplinary Execution
The hardware must be paired with a custom software suite and graphical user interface (GUI) to display real-time
sensor readout, calculate calibrated angle offsets, and provide precise digital metrology metrics. This generalized,
non-IP project requires a highly multidisciplinary approach. The team will handle the full engineering lifecycle:
establishing baseline requirements with Xcimer, selecting commercial-off-the-shelf (COTS) DUV optics and sensors,
performing rigorous opto-mechanical design and tolerancing, developing the readout software, and ultimately
calibrating and assembling the final physical units.
Hardware Funding
Xcimer Energy will supply sufficient hardware funding in addition to the $4.5K initially allotted to the project. Xcimer Energy will either procure as-needed hardware internally have it delivered to the senior design group, or work with the student team and university to establish an efficient means to obtain hardware. Total hardware budget is expect to be on the order of $20k-30k